Lam Research Donates Leading-Edge Etch System to Accelerate Nanofabrication R&D at UC Berkeley

Core Viewpoint - Lam Research Corp. has donated a multi-chamber semiconductor etching system to the Marvell Nanofabrication Laboratory at UC Berkeley to enhance research and development for next-generation chip technologies [1][2]. Group 1: Donation and Collaboration - The donation provides UC Berkeley researchers access to advanced etching technology for fabricating nanoscale semiconductor devices, which are essential for various applications including consumer electronics, AI, and quantum computing [1][2]. - This contribution is part of Lam's ongoing collaboration with UC Berkeley, aimed at expanding research and educational activities in nanoscale science and engineering [2][4]. Group 2: Technology and Capabilities - The donated system integrates Lam's Kiyo® conductor and metal etch, Flex® dielectric etch, and Syndion® GP deep reactive ion etch chambers on a Lam 2300® platform, capable of etching a wide range of materials for next-generation semiconductor devices [3]. - Lam's etch technologies will facilitate new fabrication processes for integrated optical solutions, which are critical for advancements in photonic integrated circuits and optical interconnects [4]. Group 3: Institutional Impact - UC Berkeley's College of Engineering acknowledges Lam's contributions, emphasizing the access to wafer-processing capabilities that are typically found only in sophisticated semiconductor manufacturing facilities [5]. - Lam Research is a founding member of the Berkeley Emerging Technologies Research Center and has established an endowed chair in semiconductor processing at UC Berkeley [5].