广州开发区、黄埔区：支持光刻、清洗、刻蚀、离子注入、沉积等设备、关键零部件及工具国产化替代

Core Viewpoint - The Guangzhou Development Zone and Huangpu District have introduced policies to support the high-quality development of the integrated circuit industry, focusing on the localization of key equipment and components [1] Group 1: Policy Measures - The newly released policy encourages the development of high-end semiconductor and sensor manufacturing materials, including photomasks, electronic gases, photoresists, polishing materials, and high-purity targets [1] - The policy aims to steadily enhance the supply capacity of key basic materials by actively attracting domestic key basic material enterprises [1] Group 2: Support for Localization - Continuous research and technological breakthroughs will be conducted around key components and system integration for integrated circuit manufacturing, supporting the localization of equipment such as photolithography, cleaning, etching, ion implantation, and deposition [1] - For newly introduced industrial projects with fixed asset investments exceeding 10 million yuan, companies achieving small-scale upgrades during the policy's validity period will receive support of up to 15% of their equipment and tool investment, with a maximum of 10 million yuan [1]