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两部门:研究集成电路关键工艺参数在线计量方法 形成服务集成电路的计量体系
news flash·2025-07-09 06:54

Core Viewpoint - The State Administration for Market Regulation and the Ministry of Industry and Information Technology have issued the "Measurement Support Action Plan for the Development of New Quality Productive Forces (2025-2030)", focusing on the measurement technology needs of the integrated circuit industry [1] Group 1: Integrated Circuit Industry Development - The plan emphasizes addressing technical challenges in measurement technology that support the integrated circuit industry, particularly in flat value transmission [1] - Key areas of focus include overcoming bottlenecks in wafer-level defect particle measurement, standard chip development for integrated circuit parameters, and the creation of standard materials for advanced packaging and 12-inch wafer-level standards [1] - The initiative aims to innovate new atomic-scale measurement devices, standards, and methods, targeting critical parameters such as geometric, optical, thermal, and electrical measurements [1] Group 2: Measurement Technology Advancements - The plan outlines the need to break through measurement technologies related to wafer temperature, vacuum, gas detection, and micro-vibration for integrated circuits [1] - Research will be conducted on online measurement methods for key process parameters in integrated circuits, along with the establishment of a measurement testing and evaluation system to serve the integrated circuit sector [1]