光刻机概念再度活跃，科创半导体ETF（588170）盘中涨近1%，持仓股中船特气涨近3%

Group 1 - The core viewpoint is that the AI sector continues to show strong investment potential, indicating long-term growth opportunities despite short-term challenges for domestic chip manufacturers [2] - The semiconductor industry is experiencing a shift towards domestic substitution, with the potential for accelerated development of local supply chains and new international cooperation relationships [2] - The Sci-Tech Innovation Semiconductor ETF (588170) tracks the Shanghai Stock Exchange Sci-Tech Innovation Board Semiconductor Materials and Equipment Theme Index, focusing on semiconductor equipment (59%) and materials (25%) [2] Group 2 - The Sci-Tech Innovation Semiconductor ETF (588170) has seen a significant increase in trading volume and net inflow of funds, with a recent net inflow of 10.87 million yuan and a total of 173 million yuan over the past 23 trading days [1] - The ETF's scale has grown by 10.12 million yuan in the past two weeks, with a notable increase in shares by 2 million [1] - The semiconductor materials and equipment sector is identified as a key area for domestic substitution, benefiting from the expansion of semiconductor demand driven by the AI revolution and advancements in technology [2]