珂玛科技:12寸多区加热静电卡盘已完成产品开发并交付客户进行验证测试,验证测试过程正在稳步推进中

Group 1 - The core point of the article is that Kema Technology has completed the product development of the 12-inch multi-zone heated electrostatic chuck and is currently in the verification testing phase with customers [2]. Group 2 - Kema Technology announced on September 22 that the verification testing process for the 12-inch multi-zone heated electrostatic chuck is progressing steadily [2]. - The company has not yet provided a timeline for when the product will be officially mass-produced and sold [2].