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凯尔达:公司控股子公司凯维力近期获得的可自校准的SOI基MEMS三维力传感器及其制备工艺发明专利

Core Viewpoint - The company Kailda's subsidiary, Kewili, has recently obtained a patent for a self-calibrating SOI-based MEMS three-dimensional force sensor and its manufacturing process, highlighting the company's advancements in sensor technology [1] Group 1 - The patent represents a significant technological achievement for the company, showcasing its capabilities in sensor technology [1] - The development of the self-calibrating sensor is an extension of the company's existing technological portfolio [1]