珂玛科技：12英寸静电卡盘已完成验证并实现小规模量产

Core Viewpoint - The company, Kema Technology, is actively involved in the advanced ceramics sector, primarily focusing on applications in wafer manufacturing processes, including storage chips [1] Group 1: Product Development - The company has completed verification and achieved small-scale production of its 12-inch electrostatic chucks [1] - The development of the 12-inch multi-zone heated electrostatic chuck has been completed, and the company is actively advancing its verification process [1] Group 2: Industry Applications - Advanced ceramics are utilized in various equipment for wafer manufacturing, including etching, thin film deposition, ion implantation, photolithography, and oxidation diffusion [1]