Group 1 - The core point of the article is that Shanghai Chip Micro-Assembly Technology Co., Ltd. has successfully developed and delivered its first 350nm stepper lithography machine (AST6200), marking a significant breakthrough in China's high-end semiconductor lithography equipment sector [1][3]. - The AST6200 lithography machine is designed based on years of expertise in optical system design, precision motion control, and semiconductor process understanding, aimed at advanced manufacturing scenarios such as power, RF, optoelectronics, and Micro LED [1]. - The delivery of the first AST6200 is seen as just the beginning, with the company planning to collaborate closely with upstream and downstream partners in the industry chain to accelerate the deployment and validation of domestic lithography equipment in more application scenarios [3].
芯上微装首台350nm步进光刻机正式发运，国产高端光刻家族再添新成员
Xin Lang Cai Jing·2025-11-26 12:26