科技部1.09亿下单上海微电子步进扫描式光刻机

Core Viewpoint - Shanghai Micro Electronics Equipment (Group) Co., Ltd. has won a bid for a step-and-scan lithography machine project with a contract value of approximately 109 million yuan [1] Company Overview - Shanghai Micro Electronics Equipment was established in 2002 and is involved in the development, design, manufacturing, sales, and technical services of semiconductor equipment, general semiconductor equipment, and high-end intelligent equipment [1] - The company is jointly held by Shanghai Electric Group and Shanghai Zhangjiang Haocheng Venture Capital Co., Ltd., a wholly-owned subsidiary of Zhangjiang Hi-Tech (600895) [1] Technology Insights - The step-and-scan lithography technology combines the advantages of scanning projection lithography and step-and-repeat lithography [1] - This technology utilizes dynamic scanning to simultaneously move the mask and wafer, with a standard exposure size of 26 mm x 33 mm, allowing for larger exposure fields and multiple chips to be exposed at once [1] - It features real-time focus adjustment throughout the scanning process and is suitable for manufacturing processes below 0.25μm, particularly widely used in 0.18μm nodes and more advanced processes [1]