我国研发首款等离子体工艺腔室仿真平台

Core Viewpoint - The development of the first domestically produced plasma process chamber simulation platform (MAPS) by Dalian University of Technology represents a significant advancement in atomic-level manufacturing technology, addressing existing technical bottlenecks in the industry [1] Group 1: Technology Development - MAPS can simulate atomic-level manufacturing equipment comprehensively, including external control parameters and device geometric structures, leading to reduced development time and improved efficiency [1] - The technology has been applied in several integrated circuit equipment companies, including Tuojing Technology and Huawei, achieving a 15% reduction in economic costs and a 20% reduction in time costs compared to similar foreign products [1] Group 2: Industry Collaboration - The research team collaborates with leading domestic enterprises to establish joint laboratories, allowing students to participate in technology development projects during their studies, thereby cultivating high-level talent for the industry [1] Group 3: Government Support - Liaoning Province has identified atomic-level manufacturing as a key focus for future industries, organizing promotional activities and establishing a technology plan to support foundational research and cutting-edge breakthroughs in this area [1] - The provincial government aims to accelerate the development of "root technologies" to facilitate industrial advancement and achieve a "leapfrog" development strategy [1]