我国芯片制造核心装备取得重要突破
Ke Ji Ri Bao·2026-01-17 04:25

Core Viewpoint - The successful development of China's first series-type high-energy hydrogen ion implanter (POWER-750H) marks a significant advancement in the country's semiconductor manufacturing capabilities, achieving international advanced levels in core indicators [1] Group 1: Technology Development - The POWER-750H implanter represents a breakthrough in mastering the full-chain R&D technology for series-type high-energy hydrogen ion implanters, addressing a critical link in the power semiconductor manufacturing chain [1] - The development of this technology is crucial for enhancing the autonomy and security of the semiconductor industry in China, which has long relied on foreign imports for high-energy hydrogen ion implanters [1] Group 2: Industry Impact - The ion implanter is categorized as one of the "four core equipment" essential for chip manufacturing, alongside photolithography machines, etching machines, and thin-film deposition equipment, highlighting its necessity in semiconductor production [1] - The successful R&D of the POWER-750H is expected to break the technological monopoly held by foreign companies in this field, significantly improving China's self-sufficiency in key areas such as power semiconductors [1] Group 3: Strategic Goals - The advancement in this technology supports China's dual carbon goals and accelerates the development of new productive forces, providing strong technical support for these initiatives [1]