等离子体工艺腔室仿真平台研发成功

Core Viewpoint - The development of the first domestically produced plasma process chamber simulation platform (MAPS) by Dalian University of Technology represents a significant advancement in atomic-level manufacturing technology, addressing existing technical bottlenecks in the industry [1] Group 1: Technology Development - MAPS can simulate the entire manufacturing process in a virtual environment, allowing for early product development and performance prediction [1] - The platform provides comprehensive simulations for atomic-level manufacturing equipment, including external control parameters and device geometries, ultimately saving development time and improving efficiency [1] Group 2: Economic Impact - The technology has been applied in several companies, including Tuojing Technology and Huawei, achieving a 15% reduction in economic costs and a 20% reduction in time costs compared to similar foreign products [1] Group 3: Educational Collaboration - The collaboration between the research team and leading domestic enterprises has led to the establishment of joint laboratories, enabling students to participate in technology development projects during their studies, thus fostering the cultivation of high-level talent in the industry [1] Group 4: Government Support - Liaoning Province has identified atomic-level manufacturing as a key focus for future industries, organizing promotional activities and establishing a technology plan to support foundational research and cutting-edge breakthroughs in this area [1]