晶盛机电：公司开发了应用于芯片制造的8英寸-12英寸减压外延设备、ALD设备等薄膜沉积类设备

Core Viewpoint - The company, Jing Sheng Mechanical and Electrical, has developed various equipment for chip manufacturing, including 8-inch to 12-inch reduced pressure epitaxy equipment and ALD (Atomic Layer Deposition) equipment, which are essential for different semiconductor processes [2] Group 1: Equipment Development - The company has developed 12-inch reduced pressure epitaxy equipment that is widely applicable in the manufacturing processes of logic chips, memory chips, silicon photonic chips, and power devices [2] - The atmospheric pressure epitaxy equipment is specifically suitable for power devices [2] - ALD equipment is applicable in the manufacturing processes of logic chips and memory chips [2]