首款等离子体工艺腔室仿真平台面世

Core Viewpoint - The research team from Dalian University of Technology has developed China's first plasma process chamber simulation platform (MAPS) with independent intellectual property rights, which can replicate real manufacturing processes in a virtual environment to facilitate product development and performance prediction [1] Group 1: Technology Development - MAPS allows comprehensive simulation of atomic-level manufacturing equipment, including external control parameters and device geometric structures, providing final evolution results to save development time and improve efficiency [1] - The technology has been applied in several companies, including Tuojing Technology and Huawei, achieving a 15% reduction in economic costs and a 20% reduction in time costs compared to similar foreign products [1] Group 2: Collaboration and Talent Development - The team has established in-depth collaborations with many leading domestic enterprises, creating joint laboratories that enable students to participate in joint technology development projects during their studies, thus cultivating more high-end talent for the industry [1]