国林科技：半导体专用臭氧系统设备能够产生高浓度、超纯净的臭氧

Core Viewpoint - Guolin Technology (300786) has developed a semiconductor-specific ozone system that produces high-concentration, ultra-pure ozone, which is widely used in the electronics industry for processes such as CVD and ALD film formation, as well as oxide growth [1] Group 1: Company Insights - The ozone system equipment is designed to meet the stringent requirements of semiconductor manufacturing, including precision, defect control, and material compatibility [1] - Ozone's high oxidizing properties, cleaning efficiency, and environmental characteristics make it suitable for forming nanometer-level uniform oxide layers in 3D NAND storage chip structures [1]