恒运昌：公司已向国内头部晶圆厂交付Bestda等离子体射频电源

Core Insights - The company has successfully delivered Bestda plasma RF power supplies to leading domestic wafer fabs, marking the first in-situ replacement of RF power supplies for etching equipment in China [2] - The Aspen series plasma RF power supplies and Basalt series matchers have replaced overseas plasma RF power supplies and matchers in CVD (Chemical Vapor Deposition) equipment at major domestic wafer fabs [2]