Group 1 - The semiconductor equipment ETF Huaxia (562590) rose by 1.99% to 1.946 yuan with a trading volume of 1.32 billion yuan as of the midday close on February 13 [1] - Major holdings in the semiconductor equipment ETF include: - North Huachuang up 3.39% - Zhongwei Company up 0.77% - Tuojing Technology up 3.86% - Changchuan Technology up 2.50% - Hu Silicon Industry up 0.24% - Huahai Qingke up 2.47% - Zhongke Feicai up 2.60% - Nanda Optoelectronics up 0.89% - Anji Technology up 0.09% - Chip Source Micro up 3.64% [1] - The performance benchmark for the semiconductor equipment ETF is the CSI Semiconductor Materials and Equipment Theme Index return, managed by Huaxia Fund Management Co., Ltd. The fund manager is Dan Kuan Zhi, with a return of 90.88% since its establishment on October 9, 2023, and a return of -0.41% over the past month [1]
半导体设备ETF华夏（562590）涨1.99%，半日成交额1.32亿元
Xin Lang Cai Jing·2026-02-13 03:41