2026年中国ALD设备行业发展历程、市场规模、重点企业及行业趋势分析:后摩尔时代,ALD技术凭原子级精度跃居芯片制造核心[图]
Chan Ye Xin Xi Wang·2026-02-23 01:38

Core Insights - The article highlights the rising importance of Atomic Layer Deposition (ALD) technology in the semiconductor industry, transitioning from a supporting process to a core technology for manufacturing advanced 3D chip structures. [1] - The Chinese ALD equipment market is projected to reach approximately 4.522 billion yuan in 2024, reflecting a year-on-year growth of 7.23%. This growth is driven by the increasing complexity of semiconductor manufacturing processes and the expanding applications of ALD technology beyond traditional semiconductor fields. [1][9] Industry Overview - ALD (Atomic Layer Deposition) is an advanced thin-film deposition technology that utilizes alternating gas pulses of two precursors to create highly uniform and dense nanometer-scale films on substrates. [4] - The ALD equipment industry in China has evolved from reliance on imported technology to achieving significant breakthroughs through domestic innovation over several decades. [4][5] Industry Development History - The development of the ALD equipment industry in China began in the 1970s, with early reliance on imports until domestic companies like North Huachuang and Weidao Nano initiated independent research and development efforts around 2010. [4][5] - From 2019 to 2022, significant industrialization breakthroughs were achieved, with domestic companies successfully delivering ALD equipment for various applications, including semiconductor production. [5] Industry Value Chain - The upstream of the ALD equipment industry includes raw materials such as metal-organic precursors, oxidizers, and reaction gases, as well as key systems like high-precision mass flow controllers and vacuum pumps. The midstream focuses on the R&D and production of ALD equipment, while the downstream applications span semiconductor manufacturing, photovoltaics, new energy, and more. [7] Market Size - The ALD equipment market in China is expected to grow significantly, driven by advancements in semiconductor manufacturing and the adoption of ALD technology in new applications such as high-efficiency solar cells and flexible OLED displays. [1][9] Key Companies' Performance - Weidao Nano reported a revenue of 1.722 billion yuan in the first three quarters of 2025, marking an 11.48% year-on-year increase, with a net profit of 248 million yuan, up 64.83%. [11] - North Huachuang achieved a revenue of 27.301 billion yuan in the same period, reflecting a 32.97% increase, with a net profit of 5.130 billion yuan, up 14.83%. [11][12] Industry Trends - The ALD technology is transitioning from a supporting role to a core manufacturing process as semiconductor manufacturing moves towards 3nm nodes and 3D structures. [12] - Domestic manufacturers are increasingly focusing on independent development and have begun to lead in the market, particularly in the production of advanced chips. [13] - The expansion of application scenarios for ALD technology is expected to drive growth in new fields beyond traditional semiconductor applications, including powder atomic layer deposition technology and specialized ALD equipment for emerging applications. [15]

2026年中国ALD设备行业发展历程、市场规模、重点企业及行业趋势分析:后摩尔时代,ALD技术凭原子级精度跃居芯片制造核心[图] - Reportify