Axcelis Announces Shipment of 'Purion EXE SiC Power Series' Implanter and Successful 'Purion H200 SiC Power Series' Eval Closure at Leading Power Device Manufacturers in Japan

BEVERLY, Mass., April 2, 2024 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today a shipment of the Company's Purion EXE™ SiC high energy implanter as well as a successful Purion H200™ SiC medium energy implanter evaluation closure at leading power device chipmakers located in Japan. The systems will be used for 150mm and 200mm production of silicon carbide power devices supporting automotive, in ...