2024年中国半导体设备行业总览：前道设备国产替代正当时（摘要版）

Industry Overview - The global semiconductor market was $5201 billion in 2023, a 9.4$5884 billion, a 13.1% YoY increase [7] - The global semiconductor equipment market declined 18.6% YoY to $87.4 billion in 2023, with wafer manufacturing equipment accounting for over 80$105.3 billion in 2024 [10] Semiconductor Equipment Landscape - Semiconductor equipment can be divided into manufacturing equipment (wafer production and process equipment) and packaging/testing equipment [12] - The IC manufacturing process involves complex steps including wafer fabrication, oxidation, photolithography, etc., each requiring specialized equipment [13] - Key semiconductor equipment includes etching, thin film deposition, lithography, ion implantation, CMP, and cleaning equipment [12][13] Localization of Semiconductor Equipment in China - Chinese semiconductor equipment manufacturers have achieved 35% localization rate, expected to reach 50% by 2025 [4][16] - Localization rates vary by equipment type: over 80% for stripping, 50-60% for cleaning, 55-65% for etching, but less than 10% for lithography and ion implantation [16] - US-Japan-Netherlands export controls on advanced semiconductor equipment have accelerated China's localization efforts [4][17] - China's semiconductor equipment imports reached $34.72 billion in 2022, with a trade deficit of$30.6 billion [17] Key Semiconductor Equipment Segments Thin Film Deposition Equipment - Global market size reached $26 billion in 2023, dominated by overseas players like AMAT, Lam, and TEL [21] - Advanced process nodes drive demand, with 3nm FinFET requiring over 100 deposition steps compared to 40 for 90nm CMOS [20] - Chinese players like Piotech, Naura, and AMEC are making progress in CVD, PVD, and ALD equipment [21] Etching Equipment - Dry etching accounts for over 90$8.75 billion worth of lithography equipment imported in 2023, 82.6% from Netherlands [26] - SMEE has achieved 90nm lithography equipment and is accelerating DUV immersion technology development [27] Other Key Equipment - Cleaning equipment market is dominated by SCREEN, TEL, Lam, and SEMES with over 90% share [33] - CMP equipment market is controlled by AMAT and Ebara with 95% share [32] - Thermal processing equipment market is led by AMAT with nearly 70% share [31] - Chinese players are making progress in various equipment segments but still face significant gaps in advanced technologies [16][24][27]