2024年中国晶圆检测设备行业研究报告

Industry Overview - The semiconductor process control (inspection/metrology) equipment is a core component in the integrated circuit production process, ensuring chip yield [9] - Semiconductor inspection can be categorized into front-end metrology/inspection, back-end inspection, and laboratory inspection based on the process flow [10] - The main technologies for inspection/metrology include optical inspection, electron beam inspection, and X-ray metrology [13] - The global semiconductor industry exhibits cyclical patterns, with technology driving a 10-year long cycle and capital expenditure driving a 3-4-year short cycle [16] - The global semiconductor equipment market is highly concentrated, with overseas leading manufacturers maintaining a dominant position, while Chinese semiconductor equipment manufacturers are still in the early stages of localization [19] - In wafer manufacturing equipment, the value of inspection/metrology equipment accounts for about 11%, second only to lithography, etching, and thin film deposition equipment [22] Industry Chain Analysis - The upstream of the wafer inspection equipment industry chain includes component suppliers such as motion and control systems, optical components, and mechanical processing parts, with high-precision components mainly sourced from overseas suppliers [28] - Chinese wafer inspection equipment manufacturers have achieved preliminary coverage of 28nm and above process nodes, with domestic leading manufacturers conducting R&D or verification for more advanced process nodes [31] - Chinese wafer fabs are rapidly expanding production in the 12-inch wafer field, with a total planned capacity of 4.173 million wafers per month [34] - The downstream of the wafer inspection equipment industry chain includes wafer manufacturers, with 12-inch wafer production becoming the mainstream due to its cost advantages and higher output per wafer [38] Market Size and Trends - The global semiconductor equipment market size declined by 1.3% in 2023 to $106.3 billion, with China remaining the largest semiconductor equipment market globally [46] - The global semiconductor inspection/metrology equipment market size reached $12.83 billion in 2023, with the Chinese market expected to lag behind the global market by 6-12 months in recovery [49] - The global semiconductor wafer capacity is expected to grow by 6.4% in 2024 to 31.49 million wafers per month, with China's capacity expected to grow by 13% to 8.6 million wafers per month [53] - The US, Japan, and the Netherlands have imposed export control measures on advanced semiconductor equipment to China, making localization of wafer inspection equipment imperative [56] Competitive Landscape - The global semiconductor inspection/metrology market is highly monopolized, with KLA Corporation holding over 50% market share [7] - Chinese wafer inspection equipment manufacturers have achieved coverage in various front-end inspection equipment, including patterned/unpatterned wafer defect inspection and electron beam defect inspection/review [32] - Key domestic players in the wafer inspection equipment market include Zhongke Feice, Shanghai Precision Measurement, and Chengfeng Technology, with some products already achieving mass production [33]