Workflow
涂胶显影设备是半导体制造工艺中的关键设备,国产化需求旺盛,市场发展潜力巨大

Industry Overview - Coating and developing equipment is a critical component in the semiconductor manufacturing lithography process, directly impacting the formation of fine exposure patterns and the quality of graphic development, which in turn affects subsequent processes like etching and ion implantation [1] - The equipment is categorized into front-end and back-end types, with front-end used in wafer manufacturing and back-end in packaging processes [1] - The semiconductor equipment industry is characterized by high technical, market, and customer recognition barriers, with major global players like Applied Materials, ASML, Lam Research, Tokyo Electron, and KLA dominating the market [1] - China's domestic coating and developing equipment industry is in an accelerated development phase, but still lags behind international standards in precision, resolution, process stability, reliability, and efficiency [1] Market Demand and Growth - The global front-end coating and developing equipment market is projected to grow from 3.8billionin2022to3.8 billion in 2022 to 4.5 billion in 2025, with China's market expected to reach 1.8billion(approximately13billionRMB)by2025[3]In2025,ChinasmarketforKrFandbelow,ArFi,andothercoatinganddevelopingequipmentisestimatedat1.8 billion (approximately 13 billion RMB) by 2025 [3] - In 2025, China's market for KrF and below, ArFi, and other coating and developing equipment is estimated at 940 million, 600million,and600 million, and 270 million respectively [3] - The global market is expected to grow at a compound annual growth rate (CAGR) of 4.0% from 2022 to 2025, with China's market share increasing from 26% in 2022 to 40% in 2025 [4] Industry Concentration and Domestic Progress - The coating and developing equipment industry is highly concentrated, with Tokyo Electron (TEL) dominating the front-end market, holding a 90% global market share in 2023 [5][6] - Other key global players include Japan's DNS, Germany's SUSS, Taiwan's ELS, and Korea's CND [7] - Domestic companies like SMEE and Kingsemi have made progress, with SMEE's ArF immersion coating and developing equipment securing orders from five major domestic clients, achieving domestic substitution for 28nm and above node equipment [9] - Despite these advancements, China's domestic front-end coating and developing equipment market share remains low, with significant gaps compared to international standards [9] Key Players - Tokyo Electron (TEL): Founded in 1963, listed on the Tokyo Stock Exchange, specializing in semiconductor equipment including coating/developing, thermal processing, dry etching, CVD, wet cleaning, and testing equipment [7] - DNS: Established in 1868, listed on the Tokyo Stock Exchange, focusing on semiconductor manufacturing, image processing, LCD manufacturing, and PCB equipment [7] - SUSS MicroTec: Founded in 1949, listed on the German Stock Exchange, specializing in lithography solutions and wafer bonding [7] - ELS: Established in 2005, focusing on small-scale fully automated yellow light process mass production equipment [7] - CND: Founded in 2005, specializing in fully automated yellow light equipment [7] - ACM Research: Founded in 2005, listed on NASDAQ, focusing on single-wafer wet cleaning, advanced packaging coating/developing, and single-wafer wet processing equipment [7] - Kingsemi: Established in 2002, offering coating/developing and single-wafer wet processing equipment for 6-inch and below wafer processing, as well as 8/12-inch wafer processing [7]