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1nm EUV材料,即将到来
半导体芯闻·2025-03-12 10:48

Core Viewpoint - The article discusses the challenges and advancements in the development of next-generation photoresists for extreme ultraviolet (EUV) lithography, highlighting the efforts of Irresistible Materials in creating innovative materials to meet the demands of the semiconductor industry [1][2]. Group 1: Development of Photoresists - Irresistible Materials has developed a new generation of photoresists with a thickness of just 7 angstroms, which is crucial for EUV applications [1]. - The company initially used fullerene-based materials but shifted to non-fullerene organic compounds to better control acid diffusion and improve performance [2][3]. - The new materials are designed to meet various requirements for different layers, indicating a tailored approach to customer needs [2]. Group 2: Technical Challenges - The transition to high numerical aperture (NA) lithography presents additional challenges, particularly in absorption and focus depth [3]. - The company aims to enable multiple process nodes while actively researching different formulations to address these challenges [3]. - Current materials have achieved a resolution of 18nm, with an etch depth of 16nm, demonstrating the potential for scalability to meet stringent requirements [3]. Group 3: Supply Chain and Geopolitical Considerations - The company collaborates with the EUV center in Albany and emphasizes the importance of supply chain flexibility, sourcing materials from various locations [4]. - The integration of multiple raw materials allows for adaptability in production, with potential monthly output ranging from 100 to over 1000 gallons [4]. - Partnerships with suppliers in the US, Europe, and Asia are being pursued to scale up production effectively [4]. Group 4: Funding and Future Prospects - The company acknowledges the necessity of funding to sustain its operations and is open to various sources of investment, including customer funding and strategic investors [5]. - Current financial backing comes from US material suppliers and asset management firms, indicating a supportive investment environment [5].