中科仪——深耕近70年 实现国内干式真空泵多项零的突破

Core Viewpoint - The article highlights the significant breakthroughs achieved by Zhongke Instrument in the domestic production of dry vacuum pumps, which are essential components in the integrated circuit industry, marking a shift away from reliance on foreign products [2]. Group 1: Company Overview - Zhongke Instrument, established in 1958, is a leading provider of core components for semiconductor manufacturing equipment and vacuum scientific instruments in China [2]. - The company has developed advanced dry vacuum pumps and vacuum instruments that meet international standards, filling a gap in the domestic market [2]. - As a national high-tech enterprise, Zhongke Instrument has established several national research centers and laboratories focused on vacuum technology [2]. Group 2: Industry Significance - Dry vacuum pumps play a crucial role in semiconductor manufacturing by creating a clean vacuum environment necessary for processes such as thin film deposition, etching, ion implantation, and photolithography [2]. - Zhongke Instrument's products have been validated and are in mass production at several well-known domestic integrated circuit and photovoltaic companies, breaking the long-standing monopoly of European, American, and Japanese firms in this sector [2].