光刻机中标周报 | 高校密集出手，SUSS、Raith包揽核心设备

Core Viewpoint - The article highlights the increasing demand for photolithography and electron beam lithography equipment in top universities, indicating a focus on strengthening chip talent cultivation and foundational research hardware [2]. Group 1: Equipment Demand and Procurement - Recent procurement data from June 21 to July 21 shows a surge in universities purchasing lithography equipment, which is essential for semiconductor manufacturing and modern information technology [2]. - Photolithography machines are crucial for transferring circuit patterns onto silicon wafers with nanometer-level precision, functioning similarly to a "precision projector" [2]. - The article categorizes lithography machines based on their light sources: UV, DUV, and EUV, with ASML being the only global manufacturer of EUV lithography machines [2]. Group 2: Procurement Details - Southeast University has procured a mask lithography machine (SUSS MA/BA6) for approximately 3,540,637 yuan, with the bid date set for July 17, 2025 [3]. - Sun Yat-sen University is upgrading its electron beam lithography machine (Raith, customized) for about 1,921,420 yuan, with a bid date of July 11, 2025 [3]. - Peking University Shenzhen has acquired a lithography machine (SUSS MA/BA6Gen) for around 2,996,000 yuan, also with a bid date of July 11, 2025 [3]. - Jilin Normal University is investing in a range of equipment, including a lithography machine, for a total of 3,218,980 yuan, with a bid date of June 23, 2025 [3].