揭秘芯片光刻背后的材料之战：SOC、光刻胶与抗反射涂层的突围

Core Position - Photolithography materials are crucial for chip manufacturing, directly affecting chip performance, yield, and cost, accounting for approximately one-third of the total manufacturing cost [2][10]. Key Materials - The three key materials in photolithography are SOC (Spin On Carbon), anti-reflective coatings (BARC/TARC), and photoresists, each playing a vital role in the photolithography process [10][14]. Market Drivers - The demand for materials is surging due to advanced logic and storage chips (like 3D NAND) requiring more photolithography steps, with domestic reliance on multiple exposure technologies further increasing material consumption [3][44]. Domestic Production Rate - The domestic production rate of photolithography materials is extremely low, with the market dominated by Japanese and American companies such as JSR, Shin-Etsu, and DuPont. The domestic market share for ArF photoresists is less than 2%, KrF photoresists is less than 5%, and EUV photoresists is at 0% [3][10]. Future Key Developments - The only path to achieving domestic substitution and technological catch-up is through breakthroughs in higher precision and stronger performance materials [4]. Domestic Company List - Key domestic companies include: - SOC: Xiamen Hengkang, Shanghai Xinyang Semiconductor, and Zhejiang Paibang New Materials [6]. - Anti-reflective coatings: Xiamen Hengkang, Fujian Hongguang, and Shanghai Xinkewai [7]. - Photoresists: Beijing Kehua, Suzhou Ruihong, and Shanghai Xinyang [7]. - Raw materials for photoresists: Xuzhou Bokan, Shengquan Group, and Qiangli New Materials [8]. - Adhesive materials: No mature domestic companies, primarily relying on imports [9]. Market Size and Growth - The domestic photolithography materials market is projected to grow from 53.7 billion yuan in 2019 to 121.9 billion yuan in 2023, with a compound annual growth rate (CAGR) of 22.7%, expected to reach 319.2 billion yuan by 2028 [48]. Photolithography Material Market Demand - The demand for photolithography materials is closely tied to the development of integrated circuit processes, with increasing exposure steps in advanced processes and the ongoing evolution of storage and logic chips driving the need for innovative materials [44][45]. Global Competitive Landscape - The global photolithography materials market is dominated by companies from the US and Japan, such as DuPont and Shin-Etsu, which have significant technological advantages and market shares [65].