超4000万！8月多所高校集中招标刻蚀机，国产设备获力挺

Core Viewpoint - The domestic semiconductor equipment localization process is accelerating, with over 40 million yuan allocated for etching equipment procurement, and multiple projects explicitly stating "no imports allowed" [2][3]. Group 1: Procurement Overview - As of August 31, various domestic universities and research institutions have released etching equipment procurement announcements, with a total budget exceeding 40 million yuan [3]. - The types of equipment being procured include Inductively Coupled Plasma (ICP) etching systems, Reactive Ion Beam etchers, and Capacitive Coupled Plasma etching systems, catering to different material and process requirements [3]. Group 2: Domestic Supplier Preference - Several procurement announcements explicitly favor domestic suppliers, with projects from the Chinese Academy of Sciences and Sun Yat-sen University stating "no imports allowed" [3]. - The procurement initiatives also reflect support for small and medium-sized domestic equipment companies, as seen in projects from the Chinese Academy of Sciences and Nanjing University targeting these enterprises [3]. Group 3: Concentrated Demand - The School of Electronic and Information Engineering at Sun Yat-sen University has the most concentrated demand, announcing three batches of etching equipment procurement plans on August 20-21, with a total budget of 12.54 million yuan for etching processes involving silicon oxide, lithium palladium, and silicon through holes [4].