预算1.34亿元！zycgr近期大批仪器采购意向

Core Insights - The article discusses the recent announcement by zycgr regarding 22 government procurement intentions for various instruments and equipment, with a total budget of 134 million yuan [2][3]. Procurement Overview - The procurement includes high-tech equipment such as a 350kg vacuum induction melting furnace, a 200kg protective atmosphere electric slag melting furnace, a transmission electron microscope (TEM), a critical dimension scanning electron microscope (CD-SEM), and a focused ion beam system, with expected procurement dates between August and November 2025 [3][4]. Instrument Descriptions - The Critical Dimension Scanning Electron Microscope (CD-SEM) is essential for measuring nanoscale dimensions and detecting defects in semiconductor manufacturing, directly impacting chip yield and performance [4]. - The Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) is a core technology for precise nanomaterial processing in semiconductor manufacturing, combining physical bombardment and chemical reactions for high selectivity and aspect ratio etching [5]. Detailed Procurement List - The procurement list includes various instruments with specific budget allocations, such as: - 350kg vacuum induction melting furnace: 3.4 million yuan [7] - 200kg protective atmosphere electric slag melting furnace: 2 million yuan [8] - Transmission Electron Microscope (TEM): 21.8 million yuan [9] - Critical Dimension Scanning Electron Microscope (CD-SEM): 13 million yuan [9] - Focused Ion Beam System: 17.03 million yuan [9] - The procurement is scheduled for delivery within 7 months and includes a warranty period of 12 months for the equipment [8][9].