预算1.46亿元！中国科学院上海微系统所近期大批仪器采购意向

Core Viewpoint - The Chinese Academy of Sciences Shanghai Institute of Microsystem and Information Technology has announced procurement intentions for 23 types of instruments and equipment, with a total budget of 146 million yuan, expected to be procured between August and November 2025 [1][2]. Procurement Overview - The procurement includes various advanced equipment such as MEMS wafer alignment and lithography systems, high-quality oxide dielectric film preparation units, and plasma stripping machines [2][5]. - The total budget for the procurement is 146 million yuan, which is approximately 21 million USD [1][2]. Procurement Details - A detailed list of procurement items includes: - Ion beam adjustment unit: 18 million yuan - High-quality oxide dielectric film preparation unit: 2 million yuan - Organic sacrificial layer removal unit: 2.1 million yuan - High-density multi-layer metal material preparation unit: 5 million yuan - MEMS wafer alignment and lithography system: 4.5 million yuan - Wafer cleaning machine: 5 million yuan - Plasma stripping machine: 3 million yuan - Wafer laser debonding machine: 5 million yuan - And several other specialized equipment [5][7]. Institute Background - The Shanghai Institute of Microsystem and Information Technology is one of the earliest engineering research institutions in China, originally established in 1928. It has undergone several name changes and is now focused on fields such as electronic science and technology, information and communication engineering, and microsystem technology [2][3].