3.96亿元！多个单位采购大批仪器

Core Insights - The article discusses the recent announcement by zycgr regarding 14 procurement intentions for scientific instruments, with a total budget of 396 million yuan [2][3]. Procurement Overview - The procurement includes various advanced instruments such as inductively coupled plasma etching machines, non-destructive global film thickness testing systems, multi-chamber deep silicon etching machines, and high-vacuum high-speed deposition systems [3][4]. - The expected procurement date is set for December 2025 [3]. Detailed Procurement List - The procurement list includes: - Dilution refrigerator: 700,000 yuan, requiring at least one year of warranty and lifetime technical support [5]. - Arbitrary waveform generator: 1.1 million yuan, with specifications including 4-channel output and a sampling rate of 10 GSa/s [5]. - High-vacuum high-speed deposition system: 2 million yuan, with a vacuum requirement of less than 5e-8 Torr [5]. - Inductively coupled plasma etching machine: 46.16 million yuan, for etching ion traps and quantum materials [5]. - Non-destructive global film thickness testing system: 1.5 million yuan, for testing film thickness distribution on 12-inch wafers [6]. - Multi-chamber deep silicon etching machine: 18 million yuan, for advanced packaging TSV hole etching [6]. - Fully automatic uniform coating and developing system: 32 million yuan, for automated coating and developing processes [6]. - Automated robot wafer transfer and workflow monitoring system: 100 million yuan, aimed at improving process efficiency [6]. - Ultra-stable lasers and other specialized laser systems with various specifications and budgets ranging from 143,000 to 238,000 yuan [6]. Conclusion - The procurement intentions reflect a significant investment in advanced scientific instruments, indicating a focus on enhancing research capabilities and technological advancements in the relevant fields [2][3].