超亿元！国产光刻机中标

Core Viewpoint - The article highlights the significance of the 2026 Future Industries New Materials Expo (FINE2026), focusing on five common demands in future industries, including advanced semiconductors, advanced batteries, lightweight materials, low-carbon sustainability, and thermal management [1]. Group 1: Advanced Semiconductor Equipment - Shanghai Micro Electronics Equipment (Group) Co., Ltd. won a bid for a step-and-scan lithography machine project with a transaction amount of 109.99985 million yuan [2][3]. - The step-and-scan lithography machine is a mainstream device in modern projection lithography technology, achieving high-resolution transfer of large-area patterns through dynamic scanning and stitching technology [2]. - The machine features a single-scan slit size of approximately 26 mm × 8 mm, with a maximum exposure field expandable to 26 mm × 33 mm, significantly enhancing production efficiency [2]. Group 2: Industry Context and Implications - The domestic production of lithography machines is accelerating, with breakthroughs in technology expected to drive upgrades in upstream materials and precision machinery, thereby accelerating the localization of critical materials like photoresists and optical components [5]. - Shanghai Micro Electronics Equipment (SMEE) was established in 2002 and is one of the few manufacturers in China capable of integrated research and development of lithography machines, with applications across various manufacturing fields including integrated circuits, advanced packaging, and more [5].