超1.4亿元，一单位密集采购三台国产光刻机

Core Viewpoint - A research institution has recently made significant purchases of lithography machines totaling over 140 million yuan, indicating a strong investment in advanced manufacturing technology [1]. Group 1: Procurement Details - The institution procured a stepper scanning lithography machine from Shanghai Micro Electronics Equipment (Group) Co., Ltd. for approximately 110 million yuan [1]. - An electron beam lithography machine was acquired from the China Electronics Technology Group Corporation's 48th Research Institute for about 21 million yuan [3]. - A contact lithography machine was purchased from Nanjing Suton System Integration Co., Ltd. for around 10.1 million yuan [4]. Group 2: Additional Equipment - The institution also procured wafer cleaning machines and atomic layer etching (ALE) equipment, indicating a broader investment in semiconductor manufacturing capabilities [4].