预算1.16亿元！中国科学院微电子研究所近期大批仪器采购意向

Core Insights - The Chinese Academy of Sciences Microelectronics Research Institute has announced three procurement intentions for instruments and equipment, with a total budget of 116 million yuan [1][2]. Procurement Details - The procurement includes: - A 12-inch high aspect ratio silicon oxide filling chemical vapor deposition system, budgeted at 52.6 million yuan, intended for advanced logic three-dimensional device shallow trench isolation filling, with a uniformity of less than 1.5% across the wafer [4]. - Lithography overlay accuracy measurement equipment (IBO), budgeted at 31 million yuan, which measures overlay errors with an accuracy of less than 0.15 nm and a measurement time of less than 0.3 seconds [4]. - Lithography overlay accuracy measurement equipment (DBO), budgeted at 32 million yuan, which measures overlay deviations with a total uncertainty of less than 0.2 nm and supports continuous wavelength measurement from 425 to 885 nanometers [4]. Timeline - The expected procurement time is set for November to December 2025 [2].