1.89亿元！中国科学院光电技术研究所近期大批仪器采购意向

Core Viewpoint - The Chinese Academy of Sciences' Optoelectronics Research Institute has announced procurement intentions for 16 types of instruments and equipment, with a total budget of 189 million yuan, expected to be procured by December 2025 [1][2]. Procurement Overview - The procurement includes advanced equipment such as a 6-degree-of-freedom laser interferometer system, high-precision laser vibrometer, high-power femtosecond laser, and a 12-inch micro-nano structure etching system [2][4]. - The total budget for these procurements is 189 million yuan, which indicates significant investment in high-tech instrumentation [1][2]. Detailed Procurement List - The 6-degree-of-freedom laser interferometer system is intended for high-precision displacement measurement and high-speed feedback, with specific measurement ranges and resolution [4]. - The high-precision laser vibrometer will be used for vibration testing, capable of measuring speeds up to ±10 m/s and frequencies from DC to 100 kHz [4]. - The high-power femtosecond laser is required to meet experimental needs, with a budget allocation of 295 million yuan [4]. - Other notable equipment includes a 12-inch micro-nano structure etching system, chemical vapor deposition systems, and various cleaning and processing equipment, all aimed at supporting advanced experimental requirements [5][6].