我国芯片制造核心装备，取得重要突破

Core Viewpoint - The successful development of China's first serial high-energy hydrogen ion implanter (POWER-750H) by China National Nuclear Corporation marks a significant advancement in semiconductor manufacturing technology, enhancing the country's self-sufficiency and security in critical industries [1] Group 1: Technological Advancements - The POWER-750H has achieved core indicators that meet international advanced levels, indicating a breakthrough in the full-chain R&D technology of serial high-energy hydrogen ion implanters [1] - This development is crucial for the manufacturing of power semiconductors, which are essential equipment in chip production, alongside photolithography machines, etching machines, and thin-film deposition equipment [1] Group 2: Industry Impact - The successful research and development of the high-energy hydrogen ion implanter is a significant outcome of the deep integration of nuclear technology and the semiconductor industry, which will enhance China's self-reliance in key areas such as power semiconductors [1] - The achievement supports the realization of China's "dual carbon" goals and accelerates the formation of new productive forces by providing strong technical support [1] Group 3: Historical Context - Historically, China has relied entirely on foreign imports for high-energy hydrogen ion implanters, which has been a bottleneck for the upgrade of strategic industries due to high R&D difficulty and technical barriers [1] - The successful development is attributed to decades of accumulation in the field of nuclear physics accelerators, utilizing serial accelerator technology to overcome various challenges and achieve complete mastery of the design and integration of the implanter [1]