场发射扫描电子显微镜(SEM)
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1.83亿元!zycgr近期大批仪器采购意向
仪器信息网· 2025-11-03 09:07
Core Insights - The article discusses the recent announcement by zycgr regarding the procurement intentions for 18 types of instruments, with a total budget of 183 million yuan [2][3]. Procurement Overview - The procurement includes various high-precision instruments such as thin film thickness measurement instruments, scanning electron microscopes (SEM), automated optical inspection (AOI), atomic force microscopes, white light interferometers, and fully automatic thickness testing machines, with the expected procurement period set for October to November 2025 [3][4][5][7]. Instrument Descriptions - **Thin Film Thickness Measurement Instrument**: A critical device for accurately measuring the thickness of thin film materials, widely used in semiconductor manufacturing, optical coating, photovoltaic industry, and nanomaterials research, achieving non-destructive detection with precision ranging from 0.1 nm to 10 μm [4]. - **White Light Interferometer**: A high-precision surface morphology and thickness measurement device that utilizes white light interference principles, achieving non-contact surface morphology reconstruction with a resolution of 0.01–0.1 nm, essential for semiconductor manufacturing and optical coating [5]. - **Fully Automatic Thickness Testing Machine**: An intelligent detection device designed for semiconductor manufacturing and photovoltaic production lines, enhancing detection efficiency by over 10 times through automation and AI analysis [7]. Detailed Procurement List - The procurement list includes various instruments with specific budgets and applications, such as: - Thin Film Thickness Measurement Instrument: 5.5 million yuan - Scanning Electron Microscope (SEM): 5.85 million yuan - Automated Optical Inspection (AOI): 9.77 million yuan - Atomic Force Microscope: 5.45 million yuan - White Light Interferometer: 2 million yuan - Fully Automatic Thickness Testing Machine: 3.5 million yuan [9][10].