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争当辽沈集成电路装备产业“开路先锋”
Zheng Quan Shi Bao·2025-06-24 18:48

Core Viewpoint - The article highlights the significant role of photolithography in semiconductor manufacturing, emphasizing the low domestic substitution rates for critical equipment and the achievements of ChipSource Micro in this field. Group 1: Industry Overview - Photolithography accounts for 50% of production time and 30% of costs in integrated circuit manufacturing [1] - The domestic substitution rate for photolithography equipment is less than 3%, while the rate for the associated coating and developing equipment is below 10% [1] - The coating and developing machine, along with photolithography machines and photoresists, are identified as the three essential components of the photolithography process [1] Group 2: Company Profile - ChipSource Micro is the only domestic company capable of providing mass-produced mid-to-high-end coating and developing equipment [1] - Founded in 2002, ChipSource Micro has evolved from a non-existent semiconductor market to becoming a leader in the domestic coating and developing segment [1] - The company successfully listed on the Shanghai Stock Exchange's Sci-Tech Innovation Board in 2019, marking it as the first stock from Liaoning Province on this board [1] Group 3: Challenges and Achievements - The complexity of coating and developing equipment, which includes over 150 units and multiple robotic arms, poses significant challenges [2] - The need for the coating and developing machine to operate seamlessly with the expensive photolithography machine adds to the difficulty [2] - Japanese companies dominate the market with over 90% market share, but ChipSource Micro is making strides in domestic substitution [2] Group 4: Market Potential and Growth - The low domestic substitution rates indicate substantial growth potential for ChipSource Micro, which has covered all process nodes above 28nm and over 90% of China's mature processes [3] - The company has achieved the leading market share in front-end physical cleaning equipment and is targeting long-term monopolized segments in chemical cleaning equipment [3] - ChipSource Micro has over 50% market share in advanced packaging equipment and is expanding into emerging fields like 2.5D and 3D packaging [3] Group 5: R&D and Future Outlook - The company maintains a strong commitment to R&D, with expenditures consistently above 10% of revenue, and plans to invest 297 million yuan in 2024, a nearly 50% increase year-on-year [3] - The stable talent pool and supportive government initiatives in the Liaoning region contribute to the company's growth and influence in the semiconductor equipment sector [3]