Group 1 - Hefei Chipcore Microelectronics Equipment Co., Ltd. has obtained a patent for a "Calibration Assembly and Exposure Device" with the authorization announcement number CN223260027U, applied on August 2024 [1] - The patent describes a calibration assembly that includes a bracket, calibration component, and light guide component, designed to simplify and enhance the reliability of the assembly structure [1] - The use of the light guide component allows for the adjustment of the calibration beam path, improving the precision of the calibration assembly and increasing the yield rate of the subsequent exposure device [1] Group 2 - Hefei Chipcore Microelectronics Equipment Co., Ltd. was established in 2015 and is primarily engaged in the manufacturing of instruments and meters, with a registered capital of 131.74 million RMB [2] - The company has made investments in 4 enterprises and participated in 147 bidding projects, holding 25 trademark records and 371 patent records [2] - Additionally, the company possesses 23 administrative licenses [2]
芯碁微装取得标定总成及具有其的曝光装置专利,让标定总成标定使用具有更高的使用精度