Core Viewpoint - MicroGuide Nano has successfully developed the first domestically produced High-k ALD equipment, addressing critical challenges in the semiconductor industry and contributing to the self-sufficiency of China's semiconductor sector [1] Group 1: Product Development - The High-k ALD equipment has been successfully applied in the front-end production line of integrated circuit manufacturing, overcoming key process node challenges [1] - The company has made significant advancements in CVD equipment, becoming one of the first domestic enterprises to develop hard mask chemical vapor deposition (CVD) equipment [1] Group 2: Industry Impact - The core technology of the company has achieved multi-domain coverage, precisely adapting to key application scenarios in logic chips, memory chips, advanced packaging, compound semiconductors, and new display technologies [1] - The company continues to focus on advanced process film technology solutions for semiconductors, leading the development of new architectures and devices, and addressing the demand for next-generation technology iterations in China's advanced semiconductor industry [1]
【科技自立·产业自强】微导纳米:以自主核心技术服务于半导体、新能源等国家关键产业的装备国产化战略