珂玛科技(301611.SZ):12寸多区加热静电卡盘已完成产品开发
Core Viewpoint - Kema Technology (301611.SZ) focuses on advanced ceramics primarily used in wafer manufacturing processes, including storage chips [1] Group 1: Company Developments - The company has completed verification and achieved small-scale production of its 12-inch electrostatic chucks [1] - The development of the 12-inch multi-zone heated electrostatic chuck has been completed, and the company is actively advancing its verification process [1] Group 2: Industry Applications - Advanced ceramics are applied in various equipment for etching, thin film deposition, ion implantation, photolithography, and oxidation diffusion in the semiconductor industry [1]