未来智造局丨国产半导体设备步入创新“无人区”——访微导纳米CTO

Core Viewpoint - The domestic semiconductor equipment industry in China is experiencing rapid progress in localization, showcasing strong resilience and momentum, with companies like MicroNano leading the way in innovation and market penetration [1][2]. Group 1: Company Achievements - MicroNano has successfully developed and mass-produced atomic layer deposition (ALD) equipment for 28nm integrated circuit production, breaking the monopoly of international suppliers and filling a domestic gap [2][5]. - The company has also introduced hard mask chemical vapor deposition (CVD) equipment, which has become one of the first domestic devices used in high-end storage chip packaging lines, continuously receiving bulk orders [2][5]. - MicroNano's revenue has grown from 685 million yuan in 2022 to 2.7 billion yuan in 2024, marking a fourfold increase, with semiconductor business revenue increasing over sevenfold [5]. Group 2: Market Trends - The demand for domestic semiconductor equipment is surging, with a reported annual growth rate of 20% to 30% in localization over the past two years, indicating a robust market for domestic suppliers [5][6]. - The company has entered production lines of major domestic logic and storage chip manufacturers, benefiting from the ongoing expansion of domestic storage chip capacity and the acceleration of localization in logic chips and advanced packaging [5][6]. Group 3: Future Directions - MicroNano aims to maintain a higher order growth rate than the overall industry localization process, leveraging its innovative capabilities and deep collaboration with leading domestic chip manufacturers [5][7]. - The company is focusing on transitioning from being a "follower" in technology to a "definer," emphasizing original innovation and the development of new thin film materials and integrated processes for next-generation chip manufacturing [6][7]. - MicroNano is also exploring international markets, with existing equipment exports to Europe and potential for further breakthroughs in overseas business [6].