微导纳米：在ALD设备中，水蒸气与臭氧均可作为氧源

Core Viewpoint - MicroGuide Nano stated that both water vapor and ozone can serve as oxygen sources in ALD equipment, offering customers various configuration options based on cost, stability, and process control considerations [1]. Group 1 - The company provides multiple configuration choices for its ALD equipment [1]. - Customers will determine the specific process route based on factors such as cost, stability, and process control [1].