南开大学材料科学与工程学院 讲席教授 罗锋确认演讲 | 2025势银（第五届）光刻产业大会（PRIC 2025）

Core Viewpoint - The 2025 TrendBank (Fifth) Lithography Industry Conference aims to address the challenges and advancements in lithography technology, materials, and equipment, focusing on enhancing domestic capabilities and self-sufficiency in the semiconductor industry [21][22][23]. Conference Overview - The conference will take place on July 9-10, 2025, in Hefei, Anhui, at the Sheraton Hotel [14][20]. - It will feature over 20 industry experts discussing advanced lithography technologies, including EUV, electron beam lithography, and nanoimprint techniques [16]. - The event will cover the current state of domestic lithography materials, including photoresists and wet electronic chemicals, and explore the challenges in achieving higher self-sufficiency and quality [15][21]. Keynote Speakers and Topics - Professor Luo Feng from Nankai University will present on "Low-cost multi-scenario application potential of nanoimprint/electron beam/DSA technology direction" [11][12]. - Other notable speakers include representatives from leading companies such as BOE Technology Group and Ningbo Tianxuan New Materials Technology Co., discussing various aspects of lithography technology and materials [11][12]. Industry Challenges - The domestic high-end photoresist supply rate is low, and there is a significant gap in R&D and production technology compared to international standards [21]. - The reliance on imports for high-purity and specialty wet electronic chemicals poses a supply risk [21]. - The high-precision manufacturing of masks and the dominance of foreign companies in high-end lithography machines, such as EUV lithography machines, are critical bottlenecks for the domestic semiconductor industry [21]. Strategic Importance - The conference aims to foster collaboration among academia, research institutions, and industry players to accelerate technological innovation and enhance the competitiveness of the lithography industry [22]. - It will serve as a platform for resource integration and synergy among upstream and downstream enterprises in the lithography supply chain [22].