半导体行业观察·2025-09-01 01:17Core Viewpoint - The article emphasizes the urgent need for domestic production of semiconductor overlay measurement equipment in China, particularly in light of the low localization rate and the increasing demand driven by advanced process nodes and AI chip production [1][32]. Group 1: Semiconductor Equipment Landscape - China's semiconductor industry is making significant progress in equipment, but the localization rate for advanced process semiconductor equipment remains low [1]. - The manufacturing of a chip typically requires hundreds of devices and involves 400-500 processes, with overlay measurement being a critical step [1][5]. - Overlay measurement equipment is essential for ensuring the precision of layer alignment in semiconductor manufacturing, which directly impacts chip functionality and yield [5][11]. Group 2: Overlay Measurement Equipment - Overlay measurement devices are crucial for detecting and correcting alignment errors between layers during the chip manufacturing process [5][8]. - The acceptable range for overlay errors is closely related to the critical dimensions (CD) of the layers, with specific requirements for different process nodes [11][18]. - The demand for overlay equipment is increasing, particularly in advanced process nodes, with 80% of the demand coming from these processes [22][33]. Group 3: Market Dynamics - The overlay measurement market is dominated by KLA and ASML, which together hold over 90% of the market share [24]. - KLA has a significant presence in the market with a focus on IBO technology, while ASML has gained market share through DBO technology [24][26]. - The competitive landscape shows that KLA's equipment is preferred for memory chip manufacturing, while ASML's DBO technology is favored for logic chip processes [26]. Group 4: Domestic Challenges and Opportunities - The localization rate for overlay measurement equipment in China is less than 5%, highlighting the urgent need for domestic alternatives [33]. - Domestic manufacturers like Erwei Micro are emerging, with capabilities to develop competitive overlay measurement equipment, but challenges remain in achieving consistency and stability compared to international giants [34][38]. - The collaboration with local suppliers to enhance the domestic supply chain is crucial for the sustainable development of China's semiconductor industry [38][40].