设备巨头，冲向1纳米

Core Viewpoint - Tokyo Electron is advancing its semiconductor manufacturing equipment capabilities with a new R&D building in Kumamoto, aiming to lead in next-generation semiconductor technology with a target of achieving a 1-nanometer process [1][2]. Group 1: Investment and Infrastructure - The new R&D facility in Kumamoto has a total investment of approximately 47 billion yen and covers an area of about 27,000 square meters, expected to be operational by spring 2026 [2]. - The R&D capacity of the new facility will be four times that of the previous level, featuring clean rooms that simulate the latest semiconductor manufacturing environments [2]. Group 2: Technology and Market Position - Tokyo Electron specializes in the development and manufacturing of Coater-Developer equipment, which is critical for applying photoresist materials on silicon wafers, holding a de facto monopoly in the advanced process field [3]. - The company is collaborating with ASML and imec to push the boundaries of semiconductor technology, aiming to overcome physical limits as the industry approaches the challenges posed by Moore's Law [4]. Group 3: Strategic Development and Environmental Focus - Tokyo Electron is enhancing its global R&D network to maintain close cooperation with semiconductor manufacturers, focusing on technology development over the next 10 to 15 years [5]. - The company is also prioritizing research in reducing chemical and water usage, as well as energy consumption, to lower the manufacturing costs of advanced semiconductors [5]. - Despite holding a leading position in the front-end semiconductor manufacturing processes, competition in the etching equipment sector is intensifying, prompting the company to strengthen its R&D capabilities [6].