东方晶源：三大创新点工具破解先进制程良率瓶颈

Core Viewpoint - The semiconductor industry is facing significant challenges in yield management due to the increasing complexity of chip design and manufacturing processes, particularly in the patterning phase, which is critical for achieving competitive yields in advanced nodes [1][4]. Group 1: Industry Challenges - The rapid evolution of chip processes is approaching physical limits, leading to geometric increases in technical difficulty and a significant rise in the complexity of chip designs [1]. - Systematic yield losses related to patterning have become a core bottleneck for wafer fabs, impacting research efficiency and production costs [1][4]. - For domestic semiconductor companies, yield improvement is not merely a process optimization issue but a critical factor for survival, especially given the reliance on DUV lithography for advanced nodes [4]. Group 2: Solutions Offered by Dongfang Jingyuan - Dongfang Jingyuan is positioned as a leading provider of yield enhancement solutions in the domestic integrated circuit sector, focusing on comprehensive pattern yield management from design to manufacturing [6]. - The company has launched several core tools, including DMC (Design Manufacturability Check), PHD (Patterning Hotspot Detection), and vPWQ (Virtual Process Window Qualification), as part of its PanGen Virtual-FAB product series [6][12]. Group 3: Tool Features and Innovations - DMC serves as a preemptive tool for design, simulating manufacturability checks before the chip design enters the fabrication stage, significantly improving feedback efficiency by over 100 times compared to traditional methods [8]. - PHD enhances mask verification by integrating AI with traditional OPC modeling, allowing for dynamic updates and improved accuracy in detecting complex patterns [9][10]. - vPWQ extends the bad point simulation from lithography to etching, utilizing a hybrid modeling approach that combines traditional and AI methods to enhance detection accuracy [11]. Group 4: Strategic Vision and Future Directions - Dongfang Jingyuan aims to create a closed-loop yield management system that integrates DMC, PHD, and vPWQ, transforming post-process corrections into preemptive measures to minimize systematic yield losses [13]. - The company is committed to a long-term strategy of evolving from "Virtual-FAB" to "Virtual-IDM," providing comprehensive support for the domestic semiconductor industry's self-sufficiency [19]. - The integration of AI-driven modeling with measurement equipment is expected to enhance the precision and dynamism of yield management processes, ultimately forming a unique yield enhancement workflow [19].