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TGV,难在哪里?
半导体行业观察·2025-11-08 02:10

Core Viewpoint - The transition from organic substrates to glass core substrates in advanced packaging is driven by the pursuit of higher performance, offering advantages such as superior mechanical strength, better electrical performance, and the ability to meet new line width/spacing requirements of 1.5µm and below [2][5]. Group 1: Advantages of Glass Core Substrates - Glass core substrates provide better mechanical strength and are more suitable for large-size packaging compared to organic substrates [2]. - They support advanced logic nodes and high-performance packaging with dense interconnections [2]. Group 2: Challenges in Glass Substrate Manufacturing - Glass substrates currently cannot fully replace organic substrates due to various challenges, including the brittleness of glass, which complicates the manufacturing process [5]. - The manufacturing of Through Glass Vias (TGV) requires ultra-high precision, and any small cracks or defects can lead to significant issues later in the process [5][7]. Group 3: TGV Manufacturing Process - The TGV manufacturing process begins with a defect-free glass panel, as even minor defects can accumulate and lead to catastrophic failures [8]. - Uniformity in glass panel thickness is crucial, as variations can affect the reliability and performance of the TGVs [9]. Group 4: Key Steps in TGV Manufacturing - After forming the vias, the substrate undergoes thorough cleaning to remove contaminants, which is critical for ensuring adhesion in subsequent layers [10][11]. - The deposition of a seed layer is essential for the electroplating process, and challenges include achieving uniform coverage in high aspect ratio vias [11][12]. Group 5: Process Control Solutions - Prior to TGV manufacturing, it is vital to ensure the glass panel is free from defects, utilizing advanced laser scanning and optical systems for detection [13]. - Continuous monitoring of critical dimensions and defect detection during the manufacturing process is necessary to maintain product integrity and optimize yield [14][15]. Group 6: Market Potential and Future Outlook - The market for glass core substrates is in its early stages, with significant growth potential projected, reaching an estimated revenue of $275 million by 2030 according to Yole Group [16]. - Manufacturers that invest in comprehensive process insights and tools will lead the industry as the application of glass substrates accelerates [16].