甬江实验室微纳平台验证线正式通线 | 2025异质异构集成前沿论坛

Core Viewpoint - The establishment of the micro-nano platform at the Yongjiang Laboratory marks a significant advancement in the field of heterogeneous integration, providing a comprehensive open and shared platform for semiconductor research and development [1][5][11]. Group 1: Platform Overview - The micro-nano platform has a total construction area of 12,000 square meters, including a cleanroom area of 6,000 square meters, equipped with 165 high-end precision devices and a team of over 60 personnel [3]. - It focuses on "heterogeneous integration" and aims to provide a full-chain R&D verification service for the semiconductor industry, supporting scientific discovery, technology validation, and engineering realization [5][14]. Group 2: Significance and Impact - The platform is seen as a "hardcore support" for collaborative efforts between industry, academia, and research, breaking down barriers between scientific discovery and engineering transformation, thus driving the high-quality development of the integrated circuit industry in Ningbo and nationwide [7][9]. - The opening of the 8-inch verification line is expected to enhance Ningbo's engineering verification capabilities in micro-nano manufacturing, providing higher-level public services and innovation support for the next generation of semiconductor industry [9][11]. Group 3: Future Directions - The Yongjiang Laboratory aims to create an open and shared infrastructure that serves as a neutral and credible enabling platform, linking industry, academia, and research to provide critical support for innovation and commercialization [20]. - The laboratory is committed to accumulating key verification data and exploring feasible paths from pilot testing to mass production in collaboration with academia and industry [20].