国产光刻胶关键一跃!KrF 原料自主、ArF 规模量产
是说芯语·2026-03-08 02:14

Core Viewpoint - Recent breakthroughs in the domestic high-end photoresist industry indicate a significant shift towards industrialization, with key players achieving large-scale production and certification for critical materials [1][4]. Group 1: KrF Photoresist - KrF photoresist, essential for 248nm nodes, serves as a critical link between mature and advanced processes, covering a wide range of applications from power devices to advanced packaging, and accounts for approximately 34%-35% of the overall semiconductor photoresist market [3]. - Historically, the KrF photoresist market has been dominated by Japanese companies, which hold over 90% of the global market share, leading to challenges for domestic wafer fabs in terms of high costs, long lead times, and supply risks [3][4]. - The recent establishment of a domestic 100-ton production line for KrF resin marks a significant breakthrough, addressing the upstream material bottleneck and enabling local manufacturers to achieve stable and scalable supply [4][6]. Group 2: ArF Photoresist - ArF photoresist represents a strategic advancement towards high-end processes, with Nanda Optoelectronics achieving certification and large-scale production for leading wafer fabs, covering nodes from 28nm to 14nm [6][9]. - The successful integration of KrF and ArF photoresists creates a comprehensive and sustainable tiered structure for domestic photoresist production, enhancing collaboration with domestic DUV lithography equipment [6][9]. Group 3: Industry Progress and Challenges - Despite significant advancements in KrF resin production and ArF photoresist penetration, the domestic industry still faces challenges in higher-end fields such as ArF immersion and EUV photoresists, where R&D is ongoing and competitive gaps remain [7]. - The recent achievements in photoresist production signify a milestone, reflecting the collaborative enhancement of precision chemicals, material synthesis, process adaptation, and large-scale manufacturing capabilities within the domestic semiconductor materials sector [9].

国产光刻胶关键一跃!KrF 原料自主、ArF 规模量产 - Reportify