99%的人没听过的Ushio,却是半导体界的“打光师”?
半导体行业观察·2026-03-18 00:50

Core Viewpoint - Ushio is dedicated to maximizing the potential of "light" as a core energy source driving innovation in various industries, particularly in semiconductor technology [2][19]. Group 1: Company Overview - Founded in 1964, Ushio has established itself as a global leader in "light solutions," focusing on industrial light sources and continuously pushing technological boundaries in electronics, imaging, and life sciences [2]. - Ushio believes that light is not just a tool for illumination but a key driver for the evolution of the semiconductor industry [2]. Group 2: Upcoming Events - Ushio will showcase its cutting-edge lithography technologies and solutions at SEMICON China 2026, held at the Shanghai New International Expo Center, booth number N3 3675 [5]. Group 3: Product Innovations - The UX-45114SC, part of the UX-4 series of full-field projection lithography machines, will start accepting orders in Q1 2026, achieving high alignment accuracy with a resolution of L/S=2.8μm for 6-inch and 8-inch wafers [6][7]. - The DLT series, developed in collaboration with Applied Materials, features digital lithography technology for advanced packaging, with exposure resolution reaching 1μm and alignment accuracy of 0.35μm [9]. - The UX-59113, a state-of-the-art stepper for large-area lithography, will be launched in 2026, achieving a world-class resolution of L/S=1.5μm and significantly improving alignment accuracy [11]. Group 4: Technology Applications - Ushio's halogen heating lamps convert over 85% of input power into infrared radiation, providing excellent heating performance suitable for various semiconductor manufacturing processes [13]. - The excimer lamps emit VUV (vacuum ultraviolet) light at 172nm, effectively cleaning surfaces and enhancing adhesion in semiconductor applications [16]. Group 5: Future Outlook - Ushio aims to deepen its commitment to the Chinese market, leveraging over 60 years of expertise in optical technology to contribute to industrial progress and sustainable development [19].

99%的人没听过的Ushio,却是半导体界的“打光师”? - Reportify